3                Aclass A1 bt. ir1 na  Nj  oe  rc  mt  ao  lr   y   3      &          name Tpiummep _ d i r e c t P a r a m P o w e r I n . o u t p u t Q u a n t i t y3      m          description TOiumtep uitn  q[usa]n t i t y   [ : # ( t y p e = T h e r m o f l u i d S t r e a m . S e n s o r s . I n t e r n a l . T y p e s . M a s s F l o w Q u a n t i t i e s ) ]                                                           	   dataInfo                     ÿÿÿÿÿÿÿÿ                 data_1               >@      @      @    ê            data_2            àQ¸ž?   àQ¸®?   €=
·?   àQ¸¾?   @33Ã?   €=
Ç?    GáÊ?   àQ¸Î?    ®GÑ?   @33Ó?   `¸Õ?   €=
×?   €ÂõØ?    GáÚ?   ÀÌÌÜ?   àQ¸Þ?   €ëQà?    ®Gá?    p=â?   @33ã?   Àõ(ä?   `¸å?   àzæ?   €=
ç?      è?   €Âõè?    …ëé?    Gáê?   @
×ë?   ÀÌÌì?   `�Âí?   àQ¸î?   €®ï?   €ëQð?   ÀÌÌð?    ®Gñ?   `�Âñ?    p=ò?   àQ¸ò?   @33ó?   €®ó?   Àõ(ô?    ×£ô?   `¸õ?    ™™õ?   àzö?    \�ö?   €=
÷?   À…÷?      ø?   @ázø?   €Âõø?   à£pù?    …ëù?   `ffú?    Gáú?    )\û?   @
×û?   €ëQü?   ÀÌÌü?    ®Gý?   `�Âý?    p=þ?   àQ¸þ?   @33ÿ?   €®ÿ?   àz @   €ëQ @    \� @   ÀÌÌ @   €=
@    ®G@   À…@   `�Â@      @    p=@   @áz@   àQ¸@   €Âõ@   @33@   à£p@   €®@    …ë@   Àõ(@   `ff@    ×£@    Gá@   `¸@    )\@    ™™@   @
×@   àz@   €ëQ@    \�@   ÀÌÌ@   €=
@    ®G@   À…@   `�Â@      @    p=@   @áz@   àQ¸@   €Âõ@   @33	@   à£p	@   €®	@    …ë	@   Àõ(
@   `ff
@    ×£
@    Gá
@   `¸@    )\@    ™™@   @
×@   àz@   €ëQ@    \�@   ÀÌÌ@   €=
@    ®G@   À…@   `�Â@      @    p=@   @áz@   àQ¸@   €Âõ@   @33@   à£p@   €®@    …ë@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   €=
@   Àõ(@    ®G@   `ff@   À…@    ×£@   `�Â@    Gá@      @   `¸@    p=@    )\@   @áz@    ™™@   àQ¸@   @
×@   €Âõ@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   €=
@   Àõ(@    ®G@   `ff@   À…@    ×£@   `�Â@    Gá@      @   `¸@    p=@    )\@   @áz@    ™™@   àQ¸@   @
×@   €Âõ@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   €=
@   Àõ(@    ®G@   `ff@   À…@    ×£@   `�Â@    Gá@      @   `¸@    p=@    )\@   @áz@    ™™@   àQ¸@   @
×@   €Âõ@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   €=
@   Àõ(@    ®G@   `ff@   À…@    ×£@   `�Â@    Gá@      @   `¸@    p=@    )\@   @áz@    ™™@   àQ¸@   @
×@   €Âõ@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   €=
@   Àõ(@    ®G@   `ff@   À…@    ×£@   `�Â@    Gá@      @   `¸@    p=@    )\@   @áz@    ™™@   àQ¸@   @
×@   €Âõ@   àz@   @33@   €ëQ@   à£p@    \�@   €®@   ÀÌÌ@    …ë@   À @   àz @    ×# @   @33 @   `�B @   €ëQ @    Ga @   à£p @     € @    \� @   `¸ž @   €® @    p½ @   ÀÌÌ @    )Ü @    …ë @   @áú @   €=
!@    ™!@   Àõ(!@   àQ8!@    ®G!@   @
W!@   `ff!@   €Âu!@   À…!@   àz”!@    ×£!@   @3³!@   `�Â!@   €ëÑ!@    Gá!@   à£ð!@      "@    \"@   `¸"@   €."@    p="@   ÀÌL"@    )\"@    …k"@   @áz"@   €=Š"@    ™™"@   Àõ¨"@   àQ¸"@    ®Ç"@   @
×"@   `fæ"@   €Âõ"@   À#@   àz#@    ×##@   @33#@   `�B#@   €ëQ#@    Ga#@   à£p#@     €#@    \�#@   `¸ž#@   €®#@    p½#@   ÀÌÌ#@    )Ü#@    …ë#@   @áú#@   €=
$@    ™$@   Àõ($@   àQ8$@    ®G$@   @
W$@   `ff$@   €Âu$@   À…$@   àz”$@    ×£$@   @3³$@   `�Â$@   €ëÑ$@    Gá$@   à£ð$@      %@    \%@   `¸%@   €.%@    p=%@   ÀÌL%@    )\%@    …k%@   @áz%@   €=Š%@    ™™%@   Àõ¨%@   àQ¸%@    ®Ç%@   @
×%@   `fæ%@   €Âõ%@   À&@   àz&@    ×#&@   @33&@   `�B&@   €ëQ&@    Ga&@   à£p&@     €&@    \�&@   `¸ž&@   €®&@    p½&@   ÀÌÌ&@    )Ü&@    …ë&@   @áú&@   €=
'@    ™'@   Àõ('@   àQ8'@    ®G'@   @
W'@   `ff'@   €Âu'@   À…'@   àz”'@    ×£'@   @3³'@   `�Â'@   €ëÑ'@    Gá'@   à£ð'@      (@    \(@   `¸(@   €.(@    p=(@   ÀÌL(@    )\(@    …k(@   @áz(@   €=Š(@    ™™(@   Àõ¨(@   àQ¸(@    ®Ç(@   @
×(@   `fæ(@   €Âõ(@   À)@   àz)@    ×#)@   @33)@   `�B)@   €ëQ)@    Ga)@   à£p)@     €)@    \�)@   `¸ž)@   €®)@    p½)@   ÀÌÌ)@    )Ü)@    …ë)@   @áú)@   €=
*@    ™*@   Àõ(*@   àQ8*@    ®G*@   @
W*@   `ff*@   €Âu*@   À…*@   àz”*@    ×£*@   @3³*@   `�Â*@   €ëÑ*@    Gá*@   à£ð*@      +@    \+@   `¸+@   €.+@    p=+@   ÀÌL+@    )\+@    …k+@   @áz+@   €=Š+@    ™™+@   Àõ¨+@   àQ¸+@    ®Ç+@   @
×+@   `fæ+@   €Âõ+@   À,@   àz,@    ×#,@   @33,@   `�B,@   €ëQ,@    Ga,@   à£p,@     €,@    \�,@   `¸ž,@   €®,@    p½,@   ÀÌÌ,@    )Ü,@    …ë,@   @áú,@   €=
-@    ™-@   Àõ(-@   àQ8-@    ®G-@   @
W-@   `ff-@   €Âu-@   À…-@   àz”-@    ×£-@   @3³-@   `�Â-@   €ëÑ-@    Gá-@   à£ð-@      .@    \.@   `¸.@   €..@    p=.@   ÀÌL.@    )\.@    …k.@   @áz.@   €=Š.@    ™™.@   Àõ¨.@   àQ¸.@    ®Ç.@   @
×.@   `fæ.@   €Âõ.@   À/@   àz/@    ×#/@   @33/@   `�B/@   €ëQ/@    Ga/@   à£p/@     €/@    \�/@   `¸ž/@   €®/@    p½/@   ÀÌÌ/@    )Ü/@    …ë/@   @áú/@   À0@   ÀÌ0@   àz0@    )0@    ×#0@    …+0@   @330@   @á:0@   `�B0@   €=J0@   €ëQ0@    ™Y0@    Ga0@   Àõh0@   à£p0@   àQx0@     €0@    ®‡0@    \�0@   @
—0@   `¸ž0@   `f¦0@   €®0@   €Âµ0@    p½0@   ÀÅ0@   ÀÌÌ0@   àzÔ0@    )Ü0@    ×ã0@    …ë0@   @3ó0@   @áú0@   `�1@   €=
1@   €ë1@    ™1@    G!1@   Àõ(1@   à£01@   àQ81@     @1@    ®G1@    \O1@   @
W1@   `¸^1@   `ff1@   €n1@   €Âu1@    p}1@   À…1@   ÀÌŒ1@   àz”1@    )œ1@    ×£1@    …«1@   @3³1@   @áº1@   `�Â1@   €=Ê1@   €ëÑ1@    ™Ù1@    Gá1@   Àõè1@   à£ð1@   àQø1@      2@    ®2@    \2@   @
2@   `¸2@   `f&2@   €.2@   €Â52@    p=2@   ÀE2@   ÀÌL2@   àzT2@    )\2@    ×c2@    …k2@   @3s2@   @áz2@   `�‚2@   €=Š2@   €ë‘2@    ™™2@    G¡2@   Àõ¨2@   à£°2@   àQ¸2@     À2@    ®Ç2@    \Ï2@   @
×2@   `¸Þ2@   `fæ2@   €î2@   €Âõ2@    pý2@   À3@   ÀÌ3@   àz3@    )3@    ×#3@    …+3@   @333@   @á:3@   `�B3@   €=J3@   €ëQ3@    ™Y3@    Ga3@   Àõh3@   à£p3@   àQx3@     €3@    ®‡3@    \�3@   @
—3@   `¸ž3@   `f¦3@   €®3@   €Âµ3@    p½3@   ÀÅ3@   ÀÌÌ3@   àzÔ3@    )Ü3@    ×ã3@    …ë3@   @3ó3@   @áú3@   `�4@   €=
4@   €ë4@    ™4@    G!4@   Àõ(4@   à£04@   àQ84@     @4@    ®G4@    \O4@   @
W4@   `¸^4@   `ff4@   €n4@   €Âu4@    p}4@   À…4@   ÀÌŒ4@   àz”4@    )œ4@    ×£4@    …«4@   @3³4@   @áº4@   `�Â4@   €=Ê4@   €ëÑ4@    ™Ù4@    Gá4@   Àõè4@   à£ð4@   àQø4@      5@    ®5@    \5@   @
5@   `¸5@   `f&5@   €.5@   €Â55@    p=5@   ÀE5@   ÀÌL5@   àzT5@    )\5@    ×c5@    …k5@   @3s5@   @áz5@   `�‚5@   €=Š5@   €ë‘5@    ™™5@    G¡5@   Àõ¨5@   à£°5@   àQ¸5@     À5@    ®Ç5@    \Ï5@   @
×5@   `¸Þ5@   `fæ5@   €î5@   €Âõ5@    pý5@   À6@   ÀÌ6@   àz6@    )6@    ×#6@    …+6@   @336@   @á:6@   `�B6@   €=J6@   €ëQ6@    ™Y6@    Ga6@   Àõh6@   à£p6@   àQx6@     €6@    ®‡6@    \�6@   @
—6@   `¸ž6@   `f¦6@   €®6@   €Âµ6@    p½6@   ÀÅ6@   ÀÌÌ6@   àzÔ6@    )Ü6@    ×ã6@    …ë6@   @3ó6@   @áú6@   `�7@   €=
7@   €ë7@    ™7@    G!7@   Àõ(7@   à£07@   àQ87@     @7@    ®G7@    \O7@   @
W7@   `¸^7@   `ff7@   €n7@   €Âu7@    p}7@   À…7@   ÀÌŒ7@   àz”7@    )œ7@    ×£7@    …«7@   @3³7@   @áº7@   `�Â7@   €=Ê7@   €ëÑ7@    ™Ù7@    Gá7@   Àõè7@   à£ð7@   àQø7@      8@    ®8@    \8@   @
8@   `¸8@   `f&8@   €.8@   €Â58@    p=8@   ÀE8@   ÀÌL8@   àzT8@    )\8@    ×c8@    …k8@   @3s8@   @áz8@   `�‚8@   €=Š8@   €ë‘8@    ™™8@    G¡8@   Àõ¨8@   à£°8@   àQ¸8@     À8@    ®Ç8@    \Ï8@   @
×8@   `¸Þ8@   `fæ8@   €î8@   €Âõ8@    pý8@   À9@   ÀÌ9@   àz9@    )9@    ×#9@    …+9@   @339@   @á:9@   `�B9@   €=J9@   €ëQ9@    ™Y9@    Ga9@   Àõh9@   à£p9@   àQx9@     €9@    ®‡9@    \�9@   @
—9@   `¸ž9@   `f¦9@   €®9@   €Âµ9@    p½9@   ÀÅ9@   ÀÌÌ9@   àzÔ9@    )Ü9@    ×ã9@    …ë9@   @3ó9@   @áú9@   `�:@   €=
:@   €ë:@    ™:@    G!:@   Àõ(:@   à£0:@   àQ8:@     @:@    ®G:@    \O:@   @
W:@   `¸^:@   `ff:@   €n:@   €Âu:@    p}:@   À…:@   ÀÌŒ:@   àz”:@    )œ:@    ×£:@    …«:@   @3³:@   @áº:@   `�Â:@   €=Ê:@   €ëÑ:@    ™Ù:@    Gá:@   Àõè:@   à£ð:@   àQø:@      ;@    ®;@    \;@   @
;@   `¸;@   `f&;@   €.;@   €Â5;@    p=;@   ÀE;@   ÀÌL;@   àzT;@    )\;@    ×c;@    …k;@   @3s;@   @áz;@   `�‚;@   €=Š;@   €ë‘;@    ™™;@    G¡;@   Àõ¨;@   à£°;@   àQ¸;@     À;@    ®Ç;@    \Ï;@   @
×;@   `¸Þ;@   `fæ;@   €î;@   €Âõ;@    pý;@   À<@   ÀÌ<@   àz<@    )<@    ×#<@    …+<@   @33<@   @á:<@   `�B<@   €=J<@   €ëQ<@    ™Y<@    Ga<@   Àõh<@   à£p<@   àQx<@     €<@    ®‡<@    \�<@   @
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